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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by Jean Laconte,Denis Flandre,Jean-Pierre Raskin

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

by Jean Laconte,Denis Flandre,Jean-Pierre Raskin


ISBN 13: 9781441939579

Format: Paperback (308 pages)
Publisher: Springer
Published: 29 Oct 2010

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